Abscheidung von Yttriumoxid-, Lanthanoxid- und Seltenerdoxidfilmen im HF-Plasma /
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| OCLC: | 46032338 |
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| Main Author: | |
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| Language: | German |
| Published: |
Germany :
Universität Tübingen,
1990.
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| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |
| Item Description: | Tübingen, Univ., Fak. f. Chemie u. Pharmazie, Diss. 1990. |
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| Physical Description: | 132 S. m. 57 Abb. |
| Place of Publication: | Germany. |