Abscheidung von Yttriumoxid-, Lanthanoxid- und Seltenerdoxidfilmen im HF-Plasma /
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| OCLC: | 46032338 |
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| Language: | German |
| Published: |
Germany :
Universität Tübingen,
1990.
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| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |