On electron beam lithography for LSI circuit fabrication /
Saved in:
| OCLC: | 7157665 |
|---|---|
| 主要作者: | |
| 企業作者: | |
| 語言: | English |
| 出版: |
Stockholm :
Royal Institute of Technology, Dept. of Applied Electronics,
1979.
|
| 主題: | |
| 格式: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |
| 實物描述: | 14 leaves ; 30 cm. |
|---|---|
| 參考書目: | Bibliography: leaves 13-14. |
| Place of Publication: | Sweden. |