Experimentelle Untersuchungen der Synchrotronstrahlung zur hochauflösenden Lithographie für die Grösstintegration /

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Bibliographic Details
OCLC:17111452
Main Author: Betz, Hans, 1946-
Corporate Author: Technische Universität München
Language:German
Published: 1981.
Format:

Thesis Monograph Microform

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Description Local Call Number Status
P-90015349 Available