Abscheidung von Yttriumoxid-, Lanthanoxid- und Seltenerdoxidfilmen im HF-Plasma /
Saved in:
OCLC: | 46032338 |
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主要作者: | |
企业作者: | |
语言: | German |
出版: |
Germany :
Universität Tübingen,
1990.
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格式: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |
LEADER | 01208nam a2200301Mi 4500 | ||
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001 | in00005684362 | ||
003 | OCoLC | ||
005 | 20021022143533.0 | ||
008 | 910121s1990 gw 000 0 ger d | ||
035 | |a (OCoLC)46032338 | ||
040 | |a ZXW |b ger |c ZXW |d CRL | ||
049 | |a CRLL | ||
099 | |a P-00058627 | ||
100 | 1 | |a Weber, Andreas. | |
245 | 1 | 0 | |a Abscheidung von Yttriumoxid-, Lanthanoxid- und Seltenerdoxidfilmen im HF-Plasma / |c Andreas Weber. |
264 | 1 | |a Germany : |b Universität Tübingen, |c 1990. | |
300 | |a 132 S. m. 57 Abb. | ||
336 | |a text |b txt |2 rdacontent. | ||
337 | |a unmediated |b n |2 rdamedia. | ||
338 | |a volume |b nc |2 rdacarrier. | ||
500 | |a Tübingen, Univ., Fak. f. Chemie u. Pharmazie, Diss. 1990. | ||
502 | |b Doctoral |c Eberhard-Karls-Universität zu Tübingen |d 1990. | ||
710 | 2 | |a Universität Tübingen. | |
752 | |a Germany. | ||
907 | |a .b16303143 |b 02-08-22 |c 10-22-02 | ||
998 | |a diss |b 10-22-02 |c m |d - |e - |f ger |g gw |h 0 |i 1 | ||
999 | f | f | |i c71caa2b-777e-5d27-a2dd-c573f6adaf6b |s 1cf0e190-4dc3-514b-afdf-4eb2ce2c362c |t 0 |