Plasma assisted processes for microelectronic applications /
Kaydedildi:
| OCLC: | 19470321 |
|---|---|
| Yazar: | |
| Müşterek Yazar: | |
| Dil: | English |
| Baskı/Yayın Bilgisi: |
Uppsala :
Uppsala Universitet,
1988.
|
| Seri Bilgileri: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science,
137. |
| Konular: | |
| Materyal Türü: | Tez Monograph Note that CRL will digitize material from the collection when copyright allows. |