Three new sensors and a special structure based on micromachining of silicon /
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| OCLC: | 20713139 |
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| Language: | English |
| Published: |
Göteborg, Sweden :
School of Electrical and Computer Engineering, Chalmers University of Technology,
1987.
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| Series: | Technical report (Chalmers Tekniska Högskola. Institutien for elektronfysk i och onsala rymdobservatorium) ;
no. 171. Doktorsavhandlingar vid Chalmers tekniska högskola ; ny ser., nr. 609. |
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| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |