Das Entwicklungsverhalten komplexer LIGA-Mikrostrukturen /
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| OCLC: | 45561574 |
|---|---|
| Main Author: | |
| Corporate Authors: | , |
| Other Authors: | , |
| Language: | German |
| Published: |
Karlsruhe [Germany] :
Forschungszentrum Karlsruhe,
1998.
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| Series: | Wissenschaftliche Berichte (Forschungszentrum Karlsruhe. Technik und Umwelt) ;
FZKA 6114. |
| Format: | Government Document Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |