Phenomenology of silicon wafer bonding /

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Bibliographic Details
OCLC:37835537
Main Author: Ljungberg, Karin
Corporate Author: Uppsala universitet
Language:English
Published: Uppsala : Acta Universitatis Upsaliensis, 1995.
Series:Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the faculty of science and technology, 166.
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Format:

Thesis Monograph

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Description Local Call Number Status
P-00504817 Available