On electron beam lithography for LSI circuit fabrication /
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| OCLC: | 7157665 |
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| 主要作者: | |
| 企业作者: | |
| 语言: | English |
| 出版: |
Stockholm :
Royal Institute of Technology, Dept. of Applied Electronics,
1979.
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| 主题: | |
| 格式: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |
| 实物描述: | 14 leaves ; 30 cm. |
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| 参考书目: | Bibliography: leaves 13-14. |
| Place of Publication: | Sweden. |