APA (7th ed.) Citation

Åstrand, B. (1979). On electron beam lithography for LSI circuit fabrication. Royal Institute of Technology, Dept. of Applied Electronics.

Chicago Style (17th ed.) Citation

Åstrand, Börje. On Electron Beam Lithography for LSI Circuit Fabrication. Stockholm: Royal Institute of Technology, Dept. of Applied Electronics, 1979.

MLA (8th ed.) Citation

Åstrand, Börje. On Electron Beam Lithography for LSI Circuit Fabrication. Royal Institute of Technology, Dept. of Applied Electronics, 1979.