Åstrand, B. (1979). On electron beam lithography for LSI circuit fabrication. Royal Institute of Technology, Dept. of Applied Electronics.
Citace podle Chicago (17th ed.)Åstrand, Börje. On Electron Beam Lithography for LSI Circuit Fabrication. Stockholm: Royal Institute of Technology, Dept. of Applied Electronics, 1979.
Citace podle MLA (8th ed.)Åstrand, Börje. On Electron Beam Lithography for LSI Circuit Fabrication. Royal Institute of Technology, Dept. of Applied Electronics, 1979.
Upozornění: Tyto citace jsou generovány automaticky. Nemusí být zcela správně podle citačních pravidel..