APA aipamena

Åstrand, B. (1979). On electron beam lithography for LSI circuit fabrication. Royal Institute of Technology, Dept. of Applied Electronics.

Chicago Style aipamena

Åstrand, Börje. On Electron Beam Lithography for LSI Circuit Fabrication. Stockholm: Royal Institute of Technology, Dept. of Applied Electronics, 1979.

MLA aipamena

Åstrand, Börje. On Electron Beam Lithography for LSI Circuit Fabrication. Royal Institute of Technology, Dept. of Applied Electronics, 1979.