Magnetron-gesputterte superharte, amorphe Kohlenstoffschichten mit gradiertem Schichtaufbau = Magnetron sputtered superhard amorphous carbon films with graded layer design
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OCLC: | 64545700 |
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Main Author: | |
Corporate Author: | |
Language: | German |
Published: |
Karlsruhe :
FZKA,
1997.
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Series: | Wissenschaftliche Berichte / Forschungszentrum Karlsruhe, Technik und Umwelt ;
FZKA 5919. |
Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |