1. 1
   Grundlagen für die röntgentiefenlithographische Herstellung eines planaren Wellenlängen-Demultiplexers mit selbstfokussierendem Reflexionsbeugungsgitter

   by Anderer, Boris
   Published 1990

   Karlsruhe : KfK, 1990.

   95 S : graph. Darst.

   Subjects: “...X-ray lithography....”
   

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2. 2
   Synchrotron radiation technology : spectroscopic studies of its application to lithography and deposition, and the evaluation, modeling, and design of beamline instrumentation

   by Mancini, Derrick C.
   Published 1994

   Uppsala : Stockholm : Acta Universitatis Upsaliensis ; Distributor, Almqvist & Wiksell International, 1994.

   26 p. : ill. ; 25 cm.

   Subjects: “...X-ray lithography....”
   

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