CVD growth and material quality control of silicon carbide /
Gardado en:
| OCLC: | 48750517 |
|---|---|
| Autor Principal: | |
| Autor Corporativo: | |
| Idioma: | English |
| Publicado: |
Linköping :
Dept. of Physics and Measurement Technology, Linköpings universitet,
2001.
|
| Series: | Linköping studies in science and technology. Dissertations ;
no. 713. |
| Subjects: | |
| Formato: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |