Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik /
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| OCLC: | 35502420 |
|---|---|
| Main Author: | |
| Corporate Authors: | , |
| Other Authors: | |
| Language: | German |
| Published: |
Karlsruhe [Germany] :
Kernforschungszentrum Karlsruhe GmbH,
1991.
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| Series: | KfK (Series) ;
4859. |
| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |