Studies of thin film plasma processes for microelectronic device manufacturing /
Zapisane w:
| OCLC: | 28002939 |
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| 1. autor: | |
| Korporacja: | |
| Język: | English |
| Wydane: |
Uppsala : Stockholm, Sweden :
Uppsala University ; Distributor, Almqvist & Wiksell International,
1992.
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| Seria: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science,
406. |
| Hasła przedmiotowe: | |
| Format: | Praca dyplomowa Monograph Note that CRL will digitize material from the collection when copyright allows. |