Modeling, simulation and experimental studies of plasma processing /
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| OCLC: | 41136677 |
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| 主要作者: | |
| 企業作者: | |
| 語言: | English |
| 出版: |
Uppsala :
Acta Universitatis Upsaliensis,
1997.
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| 叢編: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the faculty of science and technology,
258. |
| 主題: | |
| 格式: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |
| 實物描述: | 48 p. : ill. ; 25 cm. |
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| 參考書目: | Includes bibliographical references (p. 48) |
| ISBN: | 9155439225 |
| ISSN: | 1104-232X ; |
| Place of Publication: | Sweden. |