Modeling, simulation and experimental studies of plasma processing /
Enregistré dans:
| OCLC: | 41136677 |
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| Auteur principal: | |
| Collectivité auteur: | |
| Langue: | English |
| Publié: |
Uppsala :
Acta Universitatis Upsaliensis,
1997.
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| Collection: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the faculty of science and technology,
258. |
| Sujets: | |
| Format: | Thèse Monograph Note that CRL will digitize material from the collection when copyright allows. |
| Description matérielle: | 48 p. : ill. ; 25 cm. |
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| Bibliographie: | Includes bibliographical references (p. 48) |
| ISBN: | 9155439225 |
| ISSN: | 1104-232X ; |
| Lieu de publication: | Sweden. |