Synthese und Erprobung neuer Precursoren für die CVD-Abscheidung von III/V-Halbleitern /
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OCLC: | 51588736 |
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Main Author: | |
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Language: | German |
Published: |
Germany :
Universität Köln,
1997.
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Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |