Hochauflosende Rontgenlithografie zur Herstellung polymerer Submikrometerstrukturen mit groem Aspektverhaltnis /
Saved in:
| OCLC: | 68263568 |
|---|---|
| Main Author: | |
| Corporate Authors: | , , |
| Other Authors: | , |
| Language: | German |
| Published: |
Karlsruhe, [Germany] :
Forschungszentrum Karlsruhe,
2006.
|
| Series: | Wissenschaftliche Berichte (Forschungszentrum Karlsruhe) ;
FZKA 7215. |
| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |
| LEADER | 01878cam a2200421Ma 4500 | ||
|---|---|---|---|
| 001 | in00006190971 | ||
| 003 | OCoLC | ||
| 005 | 20060829034226.0 | ||
| 008 | 060427s2006 gw a t 000 0 ger d | ||
| 035 | |a (OCoLC)68263568 | ||
| 040 | |a CAI |c CAI |d CRL | ||
| 041 | 0 | |a ger |b eng | |
| 049 | |a CRLL | ||
| 099 | |a P-60058132 | ||
| 100 | 1 | |a Mappes, Timo. | |
| 245 | 1 | 0 | |a Hochauflosende Rontgenlithografie zur Herstellung polymerer Submikrometerstrukturen mit groem Aspektverhaltnis / |c Timo Mappes, Sven Achenbach, Jurgen Mohr. |
| 246 | 1 | |i English summary title: |a High resolution x-ray lithography for the production of polymer submicron structures with high aspect ratio. | |
| 260 | |a Karlsruhe, [Germany] : |b Forschungszentrum Karlsruhe, |c 2006. | ||
| 300 | |a iv, 71 p. : |b ill. | ||
| 336 | |a text |b txt |2 rdacontent. | ||
| 337 | |a unmediated |b n |2 rdamedia. | ||
| 338 | |a volume |b nc |2 rdacarrier. | ||
| 490 | 1 | |a Wissenschaftliche Berichte, |x 0947-8620 ; |v FZKA 7215. | |
| 502 | |b doctoral |c Universität Karlsruhe (T.H.) |d 2006. | ||
| 500 | |a At head of title: Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft. | ||
| 500 | |a On cover: Marz 2006. | ||
| 546 | |a Summary in English. | ||
| 700 | 1 | |a Achenbach, Sven. | |
| 700 | 1 | |a Mohr, Jurgen. | |
| 710 | 2 | |a Forschungszentrum Karlsruhe. | |
| 710 | 2 | |a Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft. | |
| 710 | 2 | |a Universität Karlsruhe. | |
| 752 | |a Germany. | ||
| 830 | 0 | |a Wissenschaftliche Berichte (Forschungszentrum Karlsruhe) ; |v FZKA 7215. | |
| 907 | |a .b21476615 |b 03-29-22 |c 08-29-06 | ||
| 998 | |a diss |b 08-29-06 |c m |d - |e - |f ger |g gw |h 0 |i 1 | ||
| 999 | f | f | |i b7f6d813-89c3-5eb7-a5e8-bb592fd57fdb |s 2d868939-8923-5681-94e2-58c9fdd4450d |t 0 |