Plasma assisted processes for microelectronic applications /
Saved in:
| OCLC: | 19470321 |
|---|---|
| Hovedforfatter: | |
| Institution som forfatter: | |
| Sprog: | English |
| Udgivet: |
Uppsala :
Uppsala Universitet,
1988.
|
| Serier: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science,
137. |
| Fag: | |
| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |