Plasma assisted processes for microelectronic applications /
Wedi'i Gadw mewn:
| OCLC: | 19470321 |
|---|---|
| Prif Awdur: | |
| Awdur Corfforaethol: | |
| Iaith: | English |
| Cyhoeddwyd: |
Uppsala :
Uppsala Universitet,
1988.
|
| Cyfres: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science,
137. |
| Pynciau: | |
| Fformat: | Traethawd Ymchwil Monograph Note that CRL will digitize material from the collection when copyright allows. |