Plasma assisted processes for microelectronic applications /
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| OCLC: | 19470321 |
|---|---|
| Glavni autor: | |
| Autor kompanije: | |
| Jezik: | English |
| Izdano: |
Uppsala :
Uppsala Universitet,
1988.
|
| Serija: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science,
137. |
| Teme: | |
| Format: | Disertacija Monograph Note that CRL will digitize material from the collection when copyright allows. |
| Opis: | 21 p. : ill. ; 21 cm. |
|---|---|
| Bibliografija: | Includes bibliographical references (p. 21) |
| ISBN: | 9155421997 9789155421991 |
| ISSN: | 0282-7468 ; |
| Mjesto izdanja: | Sweden. |