Plasma assisted processes for microelectronic applications /
Saved in:
| OCLC: | 19470321 |
|---|---|
| Hovedforfatter: | |
| Institution som forfatter: | |
| Sprog: | English |
| Udgivet: |
Uppsala :
Uppsala Universitet,
1988.
|
| Serier: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science,
137. |
| Fag: | |
| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |
| Fysisk beskrivelse: | 21 p. : ill. ; 21 cm. |
|---|---|
| Bibliografi: | Includes bibliographical references (p. 21) |
| ISBN: | 9155421997 9789155421991 |
| ISSN: | 0282-7468 ; |
| Place of Publication: | Sweden. |