Growth of wide-band gap A1N and (SiC)x(A1N)1-x thin films by reactive magnetron sputter deposition /
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| OCLC: | 48750551 |
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| Main Author: | |
| Corporate Author: | |
| Language: | English |
| Published: |
Linköping :
Thin Film Physics Division, Dept. of Physics and Measurement Technology, Linköpings universitet,
2001.
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| Series: | Linköping studies in science and technology. Dissertations ;
no. 711. |
| Subjects: | |
| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |
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Item List
| Description | Local Call Number | Status |
|---|---|---|
| P-00004443 | Available | |
| P-00004443 | Available |