The electrical activity of defects created in silicon single crystals during ion implantation /
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| OCLC: | 3928247 |
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| Language: | English |
| Published: |
Göteborg,
1973.
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| Series: | Doktorsavhandlingar vid Chalmers tekniska högskola.
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| Subjects: | |
| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |