Kattelus, H. (1988). Diffusion barriers in semiconductor contact metallization. Technical Research Centre of Finland.
Chicago Style (17th ed.) CitationKattelus, Hannu. Diffusion Barriers in Semiconductor Contact Metallization. Espoo: Technical Research Centre of Finland, 1988.
MLA (8th ed.) CitationKattelus, Hannu. Diffusion Barriers in Semiconductor Contact Metallization. Technical Research Centre of Finland, 1988.
Warning: These citations may not always be 100% accurate.