APA (7th ed.) Citation

Kattelus, H. (1988). Diffusion barriers in semiconductor contact metallization. Technical Research Centre of Finland.

Chicago Style (17th ed.) Citation

Kattelus, Hannu. Diffusion Barriers in Semiconductor Contact Metallization. Espoo: Technical Research Centre of Finland, 1988.

MLA (8th ed.) Citation

Kattelus, Hannu. Diffusion Barriers in Semiconductor Contact Metallization. Technical Research Centre of Finland, 1988.

Warning: These citations may not always be 100% accurate.