Studies of the reactive sputtering process and CVD of diamond thin films /

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Bibliographic Details
OCLC:47172956
Main Author: Nyberg, Tomas
Corporate Author: Uppsala universitet
Language:English
Published: Uppsala : Acta Universitatis Upsaliensis, 1997.
Series:Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ; 329.
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Format:

Thesis Monograph

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