Investigations on silicon microelectronic and micromechanic devices /

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Bibliographic Details
OCLC:22531479
Main Author: Tirén, Jonas
Corporate Author: Uppsala universitet
Language:English
Published: Uppsala : Stockholm, Sweden : Uppsala University ; Distributor, Almquist and Wiksell International, 1989.
Series:Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science, 198.
Subjects:
Silicon.
Microelectronics.
Micromechanics.
Format:

Thesis Monograph

Note that CRL will digitize material from the collection when copyright allows.

Description
Physical Description:36 p. : ill. ; 21 cm.
Bibliography:Includes bibliographical references (p. 35)
ISBN:9155423809
ISSN:0282-7468 ;
Place of Publication:Sweden.

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