Studies of thin film plasma processes for microelectronic device manufacturing /
Gardado en:
| OCLC: | 28002939 |
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| Autor Principal: | |
| Autor Corporativo: | |
| Idioma: | English |
| Publicado: |
Uppsala : Stockholm, Sweden :
Uppsala University ; Distributor, Almqvist & Wiksell International,
1992.
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| Series: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science,
406. |
| Subjects: | |
| Formato: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |