Studies of thin film plasma processes for microelectronic device manufacturing /
Sábháilte in:
| OCLC: | 28002939 |
|---|---|
| Príomhchruthaitheoir: | |
| Údar corparáideach: | |
| Teanga: | English |
| Foilsithe / Cruthaithe: |
Uppsala : Stockholm, Sweden :
Uppsala University ; Distributor, Almqvist & Wiksell International,
1992.
|
| Sraith: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science,
406. |
| Ábhair: | |
| Formáid: | Tráchtas Monograph Note that CRL will digitize material from the collection when copyright allows. |