Studies of thin film plasma processes for microelectronic device manufacturing /
Saved in:
| OCLC: | 28002939 |
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| Hovedforfatter: | |
| Institution som forfatter: | |
| Sprog: | English |
| Udgivet: |
Uppsala : Stockholm, Sweden :
Uppsala University ; Distributor, Almqvist & Wiksell International,
1992.
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| Serier: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science,
406. |
| Fag: | |
| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |