Studies of thin film plasma processes for microelectronic device manufacturing /
Wedi'i Gadw mewn:
| OCLC: | 28002939 |
|---|---|
| Prif Awdur: | |
| Awdur Corfforaethol: | |
| Iaith: | English |
| Cyhoeddwyd: |
Uppsala : Stockholm, Sweden :
Uppsala University ; Distributor, Almqvist & Wiksell International,
1992.
|
| Cyfres: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science,
406. |
| Pynciau: | |
| Fformat: | Traethawd Ymchwil Monograph Note that CRL will digitize material from the collection when copyright allows. |