Studies of thin film plasma processes for microelectronic device manufacturing /
Sparad:
| OCLC: | 28002939 |
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| Huvudupphovsman: | |
| Institutionell upphovsman: | |
| Språk: | English |
| Publicerad: |
Uppsala : Stockholm, Sweden :
Uppsala University ; Distributor, Almqvist & Wiksell International,
1992.
|
| Serie: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science,
406. |
| Ämnen: | |
| Materialtyp: | Lärdomsprov Monograph Note that CRL will digitize material from the collection when copyright allows. |
| Fysisk beskrivning: | 43 p. : ill. ; 25 cm. |
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| Bibliografi: | Includes bibliographical references (p. 42-43) |
| ISBN: | 9155429947 |
| ISSN: | 0282-7468 ; |
| Utgivningsort: | Sweden. |