Studies of thin film plasma processes for microelectronic device manufacturing /
Spremljeno u:
| OCLC: | 28002939 |
|---|---|
| Glavni autor: | |
| Autor kompanije: | |
| Jezik: | English |
| Izdano: |
Uppsala : Stockholm, Sweden :
Uppsala University ; Distributor, Almqvist & Wiksell International,
1992.
|
| Serija: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science,
406. |
| Teme: | |
| Format: | Disertacija Monograph Note that CRL will digitize material from the collection when copyright allows. |
| Opis: | 43 p. : ill. ; 25 cm. |
|---|---|
| Bibliografija: | Includes bibliographical references (p. 42-43) |
| ISBN: | 9155429947 |
| ISSN: | 0282-7468 ; |
| Mjesto izdanja: | Sweden. |