Studies of thin film plasma processes for microelectronic device manufacturing /

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Bibliografiske detaljer
OCLC:28002939
Hovedforfatter: Barklund, Anna M.
Institution som forfatter: Uppsala universitet
Sprog:English
Udgivet: Uppsala : Stockholm, Sweden : Uppsala University ; Distributor, Almqvist & Wiksell International, 1992.
Serier:Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science, 406.
Fag:
Plasma etching.
Vapor-plating.
Thin films.
Microelectronics.
Semiconductors > Etching.
Semiconductor doping.
Format:

Thesis Monograph

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Beskrivelse
Fysisk beskrivelse:43 p. : ill. ; 25 cm.
Bibliografi:Includes bibliographical references (p. 42-43)
ISBN:9155429947
ISSN:0282-7468 ;
Place of Publication:Sweden.

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