Barklund, A. M. (1992). Studies of thin film plasma processes for microelectronic device manufacturing. Uppsala University ; Distributor, Almqvist & Wiksell International.
Style de citation Chicago (17e éd.)Barklund, Anna M. Studies of Thin Film Plasma Processes for Microelectronic Device Manufacturing. Uppsala : Stockholm, Sweden: Uppsala University ; Distributor, Almqvist & Wiksell International, 1992.
Style de citation MLA (8e éd.)Barklund, Anna M. Studies of Thin Film Plasma Processes for Microelectronic Device Manufacturing. Uppsala University ; Distributor, Almqvist & Wiksell International, 1992.
Attention : ces citations peuvent ne pas être correctes à 100%.