Barklund, A. M. (1992). Studies of thin film plasma processes for microelectronic device manufacturing. Uppsala University ; Distributor, Almqvist & Wiksell International.
Chicago-viite (17. p.)Barklund, Anna M. Studies of Thin Film Plasma Processes for Microelectronic Device Manufacturing. Uppsala : Stockholm, Sweden: Uppsala University ; Distributor, Almqvist & Wiksell International, 1992.
MLA-viite (8. p.)Barklund, Anna M. Studies of Thin Film Plasma Processes for Microelectronic Device Manufacturing. Uppsala University ; Distributor, Almqvist & Wiksell International, 1992.
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