Barklund, A. M. (1992). Studies of thin film plasma processes for microelectronic device manufacturing. Uppsala University ; Distributor, Almqvist & Wiksell International.
Cita Chicago Style (17a ed.)Barklund, Anna M. Studies of Thin Film Plasma Processes for Microelectronic Device Manufacturing. Uppsala : Stockholm, Sweden: Uppsala University ; Distributor, Almqvist & Wiksell International, 1992.
Cita MLA (8a ed.)Barklund, Anna M. Studies of Thin Film Plasma Processes for Microelectronic Device Manufacturing. Uppsala University ; Distributor, Almqvist & Wiksell International, 1992.
Precaución: Estas citas no son 100% exactas.