APA (7th ed.) Citation

Barklund, A. M. (1992). Studies of thin film plasma processes for microelectronic device manufacturing. Uppsala University ; Distributor, Almqvist & Wiksell International.

Chicago Style (17th ed.) Citation

Barklund, Anna M. Studies of Thin Film Plasma Processes for Microelectronic Device Manufacturing. Uppsala : Stockholm, Sweden: Uppsala University ; Distributor, Almqvist & Wiksell International, 1992.

MLA (8th ed.) Citation

Barklund, Anna M. Studies of Thin Film Plasma Processes for Microelectronic Device Manufacturing. Uppsala University ; Distributor, Almqvist & Wiksell International, 1992.