Investigations on an RF-plasma related to plasma etching : proefschrift
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| OCLC: | 24330405 |
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| 語言: | English |
| 出版: |
Netherlands :
Technische Universiteit Eindhoven,
1987.
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| 主題: | |
| 格式: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |