Investigations on an RF-plasma related to plasma etching : proefschrift
Shranjeno v:
| OCLC: | 24330405 |
|---|---|
| Glavni avtor: | |
| Korporativna značnica: | |
| Jezik: | English |
| Izdano: |
Netherlands :
Technische Universiteit Eindhoven,
1987.
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| Teme: | |
| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |
| LEADER | 01409ctm a2200361Ia 4500 | ||
|---|---|---|---|
| 001 | in00005928275 | ||
| 003 | OCoLC | ||
| 005 | 20040730110453.0 | ||
| 008 | 910904s1987 ne a 000 0 eng d | ||
| 035 | |a (OCoLC)24330405 | ||
| 040 | |a ESU |c ESU |d OCL |d OCLCQ |d CRL | ||
| 049 | |a CRLL | ||
| 092 | |a 621.044 |b BIS | ||
| 099 | |a P-00241755 | ||
| 100 | 1 | |a Bisschops, Theodorus Hubertus Josephus. | |
| 245 | 1 | 0 | |a Investigations on an RF-plasma related to plasma etching : |b proefschrift / |c door Theodorus Hubertus Josephus Bisschops. |
| 264 | 1 | |a Netherlands : |b Technische Universiteit Eindhoven, |c 1987. | |
| 300 | |a 116 p. : |b ill. ; |c 24 cm. | ||
| 336 | |a text |b txt |2 rdacontent. | ||
| 337 | |a unmediated |b n |2 rdamedia. | ||
| 338 | |a volume |b nc |2 rdacarrier. | ||
| 500 | |a Contains summary. | ||
| 500 | |a Vita. | ||
| 502 | |b Doctoral |c Technische Universiteit Eindhoven |d 1987. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Plasma etching. | |
| 699 | 1 | |a 621.044. | |
| 710 | 2 | |a Technische Universiteit Eindhoven. | |
| 752 | |a Netherlands. | ||
| 907 | |a .b18780064 |b 02-10-22 |c 07-30-04 | ||
| 998 | |a diss |b 07-30-04 |c m |d - |e - |f eng |g ne |h 0 |i 1 | ||
| 999 | f | f | |i 50b41d49-cc87-56ea-98f6-9853bbe16b5c |s 45b404e5-2a30-5a01-be29-58822d8498c6 |t 0 |