Kinetik und Mechanismus der Silizium-Abscheidung in einer Niederdruckentladung und Kontrolle der strukturellen und physikalischen Eigenschaften des Deposits /
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| OCLC: | 46160907 |
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| Main Author: | |
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| Language: | German |
| Published: |
Switzerland :
Universität Zürich,
1990.
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| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |
| Physical Description: | 179 p. |
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| Place of Publication: | Switzerland. |