CVD growth and material quality control of silicon carbide /
Gespeichert in:
| OCLC: | 48750517 |
|---|---|
| 1. Verfasser: | |
| Körperschaft: | |
| Sprache: | English |
| Veröffentlicht: |
Linköping :
Dept. of Physics and Measurement Technology, Linköpings universitet,
2001.
|
| Schriftenreihe: | Linköping studies in science and technology. Dissertations ;
no. 713. |
| Schlagworte: | |
| Format: | Abschlussarbeit Monograph Note that CRL will digitize material from the collection when copyright allows. |