High-rate reactive magnetron sputter deposition and characterization of metal oxide films /
Saved in:
| OCLC: | 47068374 |
|---|---|
| 主要作者: | |
| 企業作者: | |
| 語言: | English |
| 出版: |
Uppsala :
Acta Universitatis Upsaliensis,
2000.
|
| 叢編: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ;
520. |
| 主題: | |
| 格式: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |