High-rate reactive magnetron sputter deposition and characterization of metal oxide films /
Kaydedildi:
| OCLC: | 47068374 |
|---|---|
| Yazar: | |
| Müşterek Yazar: | |
| Dil: | English |
| Baskı/Yayın Bilgisi: |
Uppsala :
Acta Universitatis Upsaliensis,
2000.
|
| Seri Bilgileri: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ;
520. |
| Konular: | |
| Materyal Türü: | Tez Monograph Note that CRL will digitize material from the collection when copyright allows. |