High-rate reactive magnetron sputter deposition and characterization of metal oxide films /
Salvato in:
| OCLC: | 47068374 |
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| Autore principale: | |
| Ente Autore: | |
| Lingua: | English |
| Pubblicazione: |
Uppsala :
Acta Universitatis Upsaliensis,
2000.
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| Serie: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ;
520. |
| Soggetti: | |
| Natura: | Tesi Monograph Note that CRL will digitize material from the collection when copyright allows. |