High-rate reactive magnetron sputter deposition and characterization of metal oxide films /
Sábháilte in:
OCLC: | 47068374 |
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Príomhchruthaitheoir: | |
Údar corparáideach: | |
Teanga: | English |
Foilsithe / Cruthaithe: |
Uppsala :
Acta Universitatis Upsaliensis,
2000.
|
Sraith: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ;
520. |
Ábhair: | |
Formáid: | Tráchtas Monograph Note that CRL will digitize material from the collection when copyright allows. |